Fundamentals of semiconductor manufacturing and process control Gary S. May, Costas J. Spanos.

Fundamentals of semiconductor manufacturing and process control Gary S. May, Costas J. Spanos.

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Bibliographic Details
Main Author: May, Gary S.
Corporate Author: John Wiley & Sons
Other Authors: Spanos, Costas J.
Format: eBook
Language:English
Published: [Piscataway, N.J.] : Hoboken, N.J. : IEEE ; Wiley-Interscience, c2006.
Subjects:
Semiconductors > Design and construction.
Integrated circuits > Design and construction.
Process control > Statistical methods.
Online Access:http://ieeexplore.ieee.org/xpl/bkabstractplus.jsp?bkn=5201952
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