16th IEEE International Conference on Advanced Thermal Processing of Semiconductors RTP 2008 : September 30- October 3, 2008, the Platinum Hotel and Spa, Las Vegas, NV / IEEE Electron Devices Society.

16th IEEE International Conference on Advanced Thermal Processing of Semiconductors RTP 2008 : September 30- October 3, 2008, the Platinum Hotel and Spa, Las Vegas, NV / IEEE Electron Devices Society. RTP 2008 : September 30- October 3, 2008, the Platinum Hotel and Spa, Las Vegas, NV /

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Bibliographic Details
Corporate Authors: IEEE International Conference on Advanced Thermal Processing of Semiconductors Las Vegas, Nev., IEEE Electron Devices Society
Format: eBook
Language:English
Published: Piscataway, NJ : IEEE, c2008.
Subjects:
Semiconductors > Heat treatment > Congresses.
Rapid thermal processing > Congresses.
Semiconductor doping > Congresses.
Semiconductors > Defects > Congresses.
Online Access:http://ieeexplore.ieee.org/servlet/opac?punumber=4660005
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