APA Edition Citation

IEEE International Conference on Advanced Thermal Processing of Semiconductors Catania, Italy, & IEEE Electron Devices Society. (2007). 15th IEEE International Conference on Advanced Thermal Processing of Semiconductors RTP 2007 : October 2-5, 2007, Grand Hotel Baia Verde, Catania, Italy / IEEE Electron Devices Society: RTP 2007 : October 2-5, 2007, Grand Hotel Baia Verde, Catania, Italy. IEEE.

Chicago Edition Citation

IEEE International Conference on Advanced Thermal Processing of Semiconductors Catania, Italy, and IEEE Electron Devices Society. 15th IEEE International Conference on Advanced Thermal Processing of Semiconductors RTP 2007 : October 2-5, 2007, Grand Hotel Baia Verde, Catania, Italy / IEEE Electron Devices Society: RTP 2007 : October 2-5, 2007, Grand Hotel Baia Verde, Catania, Italy. Piscataway, NJ: IEEE, 2007.

MLA Edition Citation

IEEE International Conference on Advanced Thermal Processing of Semiconductors Catania, Italy, and IEEE Electron Devices Society. 15th IEEE International Conference on Advanced Thermal Processing of Semiconductors RTP 2007 : October 2-5, 2007, Grand Hotel Baia Verde, Catania, Italy / IEEE Electron Devices Society: RTP 2007 : October 2-5, 2007, Grand Hotel Baia Verde, Catania, Italy. IEEE, 2007.