Fundamentals of semiconductor manufacturing and process control / Gary S. May, Costas J. Spanos.
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Format: | Book |
Language: | English |
Published: |
[Piscataway] : Hoboken, N.J. :
IEEE ; Wiley-Interscience,
c2006.
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Pilkington Library - Pilkington Main Collection
Shelfmark: |
621.38152/MAY |
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Copy [0403354323] | Available |