Fundamentals of semiconductor manufacturing and process control / Gary S. May, Costas J. Spanos.

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Bibliographic Details
Main Author: May, Gary S.
Other Authors: Spanos, Costas J.
Format: Book
Language:English
Published: [Piscataway] : Hoboken, N.J. : IEEE ; Wiley-Interscience, c2006.
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Pilkington Library - Pilkington Main Collection

Shelfmark: 621.38152/MAY
Copy [0403354323] Available