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| 001 | 001091851 | ||
| 005 | 20180201123303.0 | ||
| 008 | 060213s2007 xxu 000 eng d | ||
| 020 | |a 0387258744 | ||
| 020 | |a 9780387258744 | ||
| 089 | |a 620.5 | ||
| 100 | 1 | |a Jackson, Mark J. | |
| 245 | 1 | 0 | |a Micro and nanomanufacturing / |c Mark J. Jackson. |
| 260 | |a New York, N.Y. : |b Springer, |c 2007. | ||
| 650 | 0 | 0 | |a Microfabrication |
| 650 | 0 | 0 | |a Nanotechnology |
| 952 | |0 0 |1 0 |4 0 |6 620_500000000000000_JAC |7 0 |9 709767 |a PILKINGTON |b PILKINGTON |c MAIN |d 2006-02-13 |g 46.61 |l 10 |o 620.5/JAC |p 0403326877 |r 2015-05-05 |w 2018-02-01 |y LONG | ||
| 999 | |c 434474 |d 434474 | ||