Microsystems technology : fabrication, test and reliability / edited by Jumana Boussey. fabrication, test and reliability /
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| Other Authors: | |
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| Format: | Book |
| Language: | English |
| Published: |
London :
Kogan Page Science,
2003.
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| Subjects: | |
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| 008 | 030319s2003 enk h 000 eng e | ||
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| 089 | |a 621.381 | ||
| 245 | 0 | 0 | |a Microsystems technology : |b fabrication, test and reliability / |c edited by Jumana Boussey. |
| 260 | |a London : |b Kogan Page Science, |c 2003. | ||
| 300 | |a 320 p. (hbk) ; |c 24 cm. | ||
| 500 | |a Microsystems technology encompasses microfabrication techniques and uses a range of expertise from specific design to customized packing and a large range of collective fabrication procedures. This work covers the subject from various aspects, including surface and bulk micromachining and sensors. | ||
| 650 | 0 | 0 | |a Microelectronics |
| 650 | 0 | 0 | |a Microfabrication |
| 700 | 1 | |a Boussey, Jumana | |
| 952 | |0 0 |1 0 |4 0 |6 621_381000000000000_MIC |7 0 |9 680349 |a PILKINGTON |b PILKINGTON |c MAIN |d 2004-06-03 |g 85.00 |l 4 |o 621.381/MIC |p 0402909933 |r 2010-12-13 |w 2018-02-01 |y LONG | ||
| 999 | |c 418094 |d 418094 | ||