Microsystems technology : fabrication, test and reliability / edited by Jumana Boussey. fabrication, test and reliability /

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Bibliographic Details
Other Authors: Boussey, Jumana
Format: Book
Published: London : Kogan Page Science, 2003.
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Item Description:Microsystems technology encompasses microfabrication techniques and uses a range of expertise from specific design to customized packing and a large range of collective fabrication procedures. This work covers the subject from various aspects, including surface and bulk micromachining and sensors.
Physical Description:320 p. (hbk) ; 24 cm.