Microsystems technology : fabrication, test and reliability / edited by Jumana Boussey. fabrication, test and reliability /
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| Other Authors: | |
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| Format: | Book |
| Language: | English |
| Published: |
London :
Kogan Page Science,
2003.
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| Subjects: | |
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| Item Description: | Microsystems technology encompasses microfabrication techniques and uses a range of expertise from specific design to customized packing and a large range of collective fabrication procedures. This work covers the subject from various aspects, including surface and bulk micromachining and sensors. |
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| Physical Description: | 320 p. (hbk) ; 24 cm. |
| ISBN: | 1903996473 |