Microsystems technology : fabrication, test and reliability / edited by Jumana Boussey. fabrication, test and reliability /
Kogan Page Science,
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|Item Description:||Microsystems technology encompasses microfabrication techniques and uses a range of expertise from specific design to customized packing and a large range of collective fabrication procedures. This work covers the subject from various aspects, including surface and bulk micromachining and sensors.|
|Physical Description:||320 p. (hbk) ; 24 cm.|