Silicon-on-insulator technology : materials to VLSI / by Jean-Pierre Colinge. materials to VLSI /
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Main Author: | Colinge, Jean-Pierre |
---|---|
Format: | Book |
Language: | English |
Published: |
Boston, Mass. ; London :
Kluwer Academic,
2003.
|
Edition: | 3rd ed. |
Subjects: | |
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