Silicon-on-insulator technology : materials to VLSI / by Jean-Pierre Colinge. materials to VLSI /

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Bibliographic Details
Main Author: Colinge, Jean-Pierre
Format: Book
Language:English
Published: Boston, Mass. ; London : Kluwer Academic, 2003.
Edition:3rd ed.
Subjects:
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245 1 0 |a Silicon-on-insulator technology :  |b materials to VLSI /  |c by Jean-Pierre Colinge. 
250 |a 3rd ed. 
260 |a Boston, Mass. ;  |a London :  |b Kluwer Academic,  |c 2003. 
300 |a 384 p. (hbk). 
500 |a Previous ed.: 1997 
504 |a Includes bibliographical references and index 
650 0 0 |a Semiconductors 
650 0 0 |a Silicon-on-insulator technology 
650 0 0 |a Integrated circuits  |x Very large scale integration  |x Materials 
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