Silicon-on-insulator technology : materials to VLSI / by Jean-Pierre Colinge. materials to VLSI /
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| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
Boston, Mass. ; London :
Kluwer Academic,
2003.
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| Edition: | 3rd ed. |
| Subjects: | |
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| Item Description: | Previous ed.: 1997 |
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| Physical Description: | 384 p. (hbk). |
| Bibliography: | Includes bibliographical references and index |
| ISBN: | 1402077734 |