Chemical vapor deposition polymerization : the growth and properties of parylene thin films / Jeffrey B. Fortin, Toh-Ming Lu. the growth and properties of parylene thin films /
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Main Author: | Fortin, Jeffrey B. |
---|---|
Other Authors: | Lu, Toh-Ming |
Format: | Book |
Language: | English |
Published: |
Boston, Mass. ; London :
Kluwer Academic,
2004.
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