Chemical vapor deposition polymerization : the growth and properties of parylene thin films / Jeffrey B. Fortin, Toh-Ming Lu. the growth and properties of parylene thin films /
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| Format: | Book |
| Language: | English |
| Published: |
Boston, Mass. ; London :
Kluwer Academic,
2004.
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| 005 | 20180201122240.0 | ||
| 008 | 030930s2004 xxu h 000 eng e | ||
| 020 | |a 1402076886 | ||
| 040 | |a BDS | ||
| 089 | |a 621.3817 | ||
| 100 | 1 | |a Fortin, Jeffrey B. | |
| 245 | 1 | 0 | |a Chemical vapor deposition polymerization : |b the growth and properties of parylene thin films / |c Jeffrey B. Fortin, Toh-Ming Lu. |
| 260 | |a Boston, Mass. ; |a London : |b Kluwer Academic, |c 2004. | ||
| 650 | 0 | 0 | |a Chemical vapor deposition |
| 650 | 0 | 0 | |a Thin films |
| 650 | 0 | 0 | |a Polymerization |
| 700 | 1 | |a Lu, Toh-Ming | |
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