MEMS and NEMS : systems, devices, and structures / Sergey Edward Lyshevski. systems, devices, and structures /
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Main Author: | |
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Format: | Book |
Language: | English |
Published: |
Boca Raton, FL :
CRC Press,
2001.
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Series: | Nano- and microscience, engineering, technology, and medicine series
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Subjects: | |
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Pilkington Library - Pilkington Main Collection
Shelfmark: |
621.3817/LYS |
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Copy [0402522508] | Available |