Fundamentals of microfabrication : the science of miniaturization / Marc J. Madou. the science of miniaturization /
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Main Author: | |
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Format: | Book |
Language: | English |
Published: |
Boca Raton, FL :
CRC Press,
2001.
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Edition: | 2nd ed. |
Subjects: | |
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Pilkington Library - Pilkington Main Collection
Shelfmark: |
621.5/MAD |
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Copy [0402528026] | Available |