Dusty plasmas : physics, chemistry, and technological impacts in plasma processing / edited by André Bouchoule. physics, chemistry, and technological impacts in plasma processing /
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Format: | Book |
Language: | English |
Published: |
Chichester :
Wiley,
c1999
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082 | 0 | 4 | |a 660.044 |2 21 |
089 | |a 660.044 | ||
245 | 0 | 0 | |a Dusty plasmas : |b physics, chemistry, and technological impacts in plasma processing / |c edited by André Bouchoule. |
260 | |a Chichester : |b Wiley, |c c1999 | ||
300 | |a viii, 408p : |b ill. ; |c 24cm | ||
504 | |a Includes bibliographical references and indexes | ||
650 | 0 | 0 | |a Plasma engineering |
650 | 0 | 0 | |a Plasma (Ionized gases) |x Industrial applications |
650 | 0 | 0 | |a Dusty plasmas |
650 | 0 | 0 | |a Plasma chemistry |
650 | 0 | 0 | |a Plasma-enhanced chemical vapor deposition |
700 | 1 | |a Bouchoule, André | |
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999 | |c 380578 |d 380578 |