Handbook of microlithography, micromachining, and microfabrication / P. Rai-Choudhury, editor Vol.1, Microlithography.
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| Corporate Author: | |
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| Other Authors: | |
| Format: | Book |
| Language: | English |
| Published: |
Bellingham, Wash. : London :
SPIE Optical Engineering Press ; Institution of Electrical Engineers,
1997
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| Series: | IEE materials and devices series ;
12 SPIE Press monograph ; PM39 |
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Pilkington Library - Pilkington Main Collection
| Shelfmark: |
621.38173/HAN |
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| Copy [0401537765] | Available |