Computational modeling in semiconductor processing / M. Meyyappan, editor.
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| Other Authors: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Boston, Mass. ; London :
Artech House,
1995
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| Series: | The Artech House materials science library
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| Subjects: | |
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| 245 | 0 | 0 | |a Computational modeling in semiconductor processing / |c M. Meyyappan, editor. |
| 260 | |a Boston, Mass. ; |a London : |b Artech House, |c 1995 | ||
| 300 | |a x, 363p : |b ill ; |c 24cm | ||
| 490 | 4 | |a The Artech House materials science library | |
| 504 | |a Bibliography: p348-350. -Includes index | ||
| 650 | 0 | 0 | |a Semiconductors |x Design and construction |x Data processing |
| 650 | 0 | 0 | |a Process control |x Mathematical models |
| 650 | 0 | 0 | |a Semiconductor industry |
| 700 | 1 | |a Meyyappan, M. | |
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