Computational modeling in semiconductor processing / M. Meyyappan, editor.
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| Other Authors: | |
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| Format: | Book |
| Language: | English |
| Published: |
Boston, Mass. ; London :
Artech House,
1995
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| Series: | The Artech House materials science library
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| Subjects: | |
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| Physical Description: | x, 363p : ill ; 24cm |
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| Bibliography: | Bibliography: p348-350. -Includes index |
| ISBN: | 0890067074 |