The physics of micro/nano-fabrication / Ivor Brodie and Julius J. Muray.
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| Main Author: | |
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| Other Authors: | |
| Format: | Book |
| Language: | English |
| Published: |
New York ; London :
Plenum,
c1992
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| Series: | Microdevices
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Pilkington Library - Pilkington Main Collection
| Shelfmark: |
621.3817/BRO |
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| Copy [040074211X] | Available |