Plasma processing of materials : scientific opportunities and technological challenges / Panel on Plasma Processing of Materials ; Plasma Science Committee. scientific opportunities and technological challenges /
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| Corporate Authors: | , |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Washington, D.C. :
National Academy Press,
1991
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| 245 | 0 | 0 | |a Plasma processing of materials : |b scientific opportunities and technological challenges / |c Panel on Plasma Processing of Materials ; Plasma Science Committee. |
| 260 | |a Washington, D.C. : |b National Academy Press, |c 1991 | ||
| 500 | |a On cover: National Research Council | ||
| 710 | 1 | |a National Research Council (U.S.). |b Plasma Science Committee | |
| 710 | 2 | |a Panel on Plasma Processing of Materials | |
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