Plasma processing of materials : scientific opportunities and technological challenges / Panel on Plasma Processing of Materials ; Plasma Science Committee. scientific opportunities and technological challenges /

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Bibliographic Details
Corporate Authors: National Research Council (U.S.). Plasma Science Committee, Panel on Plasma Processing of Materials
Format: Book
Language:English
Published: Washington, D.C. : National Academy Press, 1991
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Description
Item Description:On cover: National Research Council
ISBN:0309045975