Laser microfabrication : thin film processes and lithography / edited by Daniel J. Ehrlich, Jeffrey Y. Tsao.. thin film processes and lithography /
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| Other Authors: | , |
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| Format: | Book |
| Language: | English |
| Published: |
Boston ; London :
Academic Press,
c1989
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| Subjects: | |
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Pilkington Library - Pilkington Main Collection
| Shelfmark: |
621.366/LAS |
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| Copy [0400110563] | Available |