Silicon processing (Conference) 1982, San Jose : Proceedings of the Symposium / edited by D.C. Gupta. Proceedings of the Symposium /
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| Format: | Book |
| Language: | English |
| Published: |
ASTM,
1983.
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| Series: | ASTM special technical publication ;
804 |
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| 001 | 000128815 | ||
| 005 | 20180201144139.0 | ||
| 008 | 960614s1983 eng | ||
| 089 | |a 621.3817 | ||
| 089 | |a 537.622 | ||
| 245 | 0 | 0 | |a Silicon processing (Conference) 1982, San Jose : |b Proceedings of the Symposium / |c edited by D.C. Gupta. |
| 260 | |b ASTM, |c 1983. | ||
| 490 | 0 | |a ASTM special technical publication ; |v 804 | |
| 700 | 1 | |a Gupta, D. C. | |
| 710 | 2 | |a American Society for Testing and Materials. |9 1896 | |
| 787 | |a ASTM special technical publication |t No.804. Silicon processing (Conference) 1982, San Jose |w 000663574 | ||
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| 999 | |c 109652 |d 109652 | ||