Silicon processing (Conference) 1982, San Jose : Proceedings of the Symposium / edited by D.C. Gupta. Proceedings of the Symposium /

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Bibliographic Details
Corporate Author: American Society for Testing and Materials
Other Authors: Gupta, D. C.
Format: Book
Published: ASTM, 1983.
Series:ASTM special technical publication ; 804
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Pilkington Library - Pilkington Main Collection

Call Number: 621.3817/SIL
Copy [025844601] Available