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Evaluation of TEM specimen quality prepared by focused ion beam using symmetry breaking index of convergent-beam electron diffraction
Abstract Degradation of the crystalline quality of transmission electron microscopy specimens in silicon prepared with different conditions has been examined using convergent-beam electron diffraction (CBED). The specimens are prepared using focused ion beam (FIB) with different accelerating voltage...
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Published in: | Microscopy 2021-08, Vol.70 (4), p.394-397 |
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creator | Morikawa, Daisuke Ageishi, Masaki Sato, Kaori Tsuda, Kenji Terauchi, Masami |
description | Abstract
Degradation of the crystalline quality of transmission electron microscopy specimens in silicon prepared with different conditions has been examined using convergent-beam electron diffraction (CBED). The specimens are prepared using focused ion beam (FIB) with different accelerating voltages, Ar-ion milling and crushing method. Symmetry breaking of CBED patterns was quantitatively evaluated by symmetry breaking index S, which has been previously reported. The degradation and inhomogeneity of the FIB specimen were suppressed by decreasing the accelerating voltages of the FIB fabrication in the final process. |
doi_str_mv | 10.1093/jmicro/dfab002 |
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Degradation of the crystalline quality of transmission electron microscopy specimens in silicon prepared with different conditions has been examined using convergent-beam electron diffraction (CBED). The specimens are prepared using focused ion beam (FIB) with different accelerating voltages, Ar-ion milling and crushing method. Symmetry breaking of CBED patterns was quantitatively evaluated by symmetry breaking index S, which has been previously reported. The degradation and inhomogeneity of the FIB specimen were suppressed by decreasing the accelerating voltages of the FIB fabrication in the final process.</description><identifier>ISSN: 2050-5698</identifier><identifier>EISSN: 2050-5701</identifier><identifier>DOI: 10.1093/jmicro/dfab002</identifier><identifier>PMID: 33449081</identifier><language>eng</language><publisher>UK: Oxford University Press</publisher><ispartof>Microscopy, 2021-08, Vol.70 (4), p.394-397</ispartof><rights>The Author(s) 2021. Published by Oxford University Press on behalf of The Japanese Society of Microscopy. All rights reserved. For permissions, please e-mail: journals.permissions@oup.com 2021</rights><rights>The Author(s) 2021. Published by Oxford University Press on behalf of The Japanese Society of Microscopy. All rights reserved. For permissions, please e-mail: journals.permissions@oup.com.</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c395t-fde2fe8c1761f32eb032e664147edbe71f53a4ea28454156e1c35cf628bca9613</citedby><cites>FETCH-LOGICAL-c395t-fde2fe8c1761f32eb032e664147edbe71f53a4ea28454156e1c35cf628bca9613</cites><orcidid>0000-0001-9414-2891 ; 0000-0001-8110-7499</orcidid></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>315,786,790,1591,27957,27958</link.rule.ids><backlink>$$Uhttps://www.ncbi.nlm.nih.gov/pubmed/33449081$$D View this record in MEDLINE/PubMed$$Hfree_for_read</backlink></links><search><creatorcontrib>Morikawa, Daisuke</creatorcontrib><creatorcontrib>Ageishi, Masaki</creatorcontrib><creatorcontrib>Sato, Kaori</creatorcontrib><creatorcontrib>Tsuda, Kenji</creatorcontrib><creatorcontrib>Terauchi, Masami</creatorcontrib><title>Evaluation of TEM specimen quality prepared by focused ion beam using symmetry breaking index of convergent-beam electron diffraction</title><title>Microscopy</title><addtitle>Microscopy (Oxf)</addtitle><description>Abstract
Degradation of the crystalline quality of transmission electron microscopy specimens in silicon prepared with different conditions has been examined using convergent-beam electron diffraction (CBED). The specimens are prepared using focused ion beam (FIB) with different accelerating voltages, Ar-ion milling and crushing method. Symmetry breaking of CBED patterns was quantitatively evaluated by symmetry breaking index S, which has been previously reported. The degradation and inhomogeneity of the FIB specimen were suppressed by decreasing the accelerating voltages of the FIB fabrication in the final process.</description><issn>2050-5698</issn><issn>2050-5701</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2021</creationdate><recordtype>article</recordtype><recordid>eNqFkLtOwzAUhi0EolXpyog8wpDWduxcRlSVi1TEUubIcY4rl9xqJxV5AN6bhLSseLCPrO__j_QhdEvJgpLYX-4Lo2y1zLRMCWEXaMqIIJ4ICb08z0EcTdDcuT3pTyQo4cE1mvg-5zGJ6BR9r48yb2VjqhJXGm_Xb9jVoEwBJT60MjdNh2sLtbSQ4bTDulKt68eBT0EWuHWm3GHXFQU0tsOpBfk5_Jgyg6-hUlXlEewOysb7DUAOqrF9PDNaW6mG1TfoSsvcwfz0ztDH03q7evE278-vq8eNp_xYNJ7OgGmIFA0Dqn0GKemvIOCUh5ClEFItfMlBsogLTkUAVPlC6YBFqZJxQP0Zuh97a1sdWnBNUhinIM9lCVXrEsbDSMSMxKxHFyPaG3bOgk5qawppu4SSZLCfjPaTk_0-cHfqbtMCsj_87LoHHkagauv_yn4AuYCTTQ</recordid><startdate>20210809</startdate><enddate>20210809</enddate><creator>Morikawa, Daisuke</creator><creator>Ageishi, Masaki</creator><creator>Sato, Kaori</creator><creator>Tsuda, Kenji</creator><creator>Terauchi, Masami</creator><general>Oxford University Press</general><scope>NPM</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7X8</scope><orcidid>https://orcid.org/0000-0001-9414-2891</orcidid><orcidid>https://orcid.org/0000-0001-8110-7499</orcidid></search><sort><creationdate>20210809</creationdate><title>Evaluation of TEM specimen quality prepared by focused ion beam using symmetry breaking index of convergent-beam electron diffraction</title><author>Morikawa, Daisuke ; Ageishi, Masaki ; Sato, Kaori ; Tsuda, Kenji ; Terauchi, Masami</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c395t-fde2fe8c1761f32eb032e664147edbe71f53a4ea28454156e1c35cf628bca9613</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2021</creationdate><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Morikawa, Daisuke</creatorcontrib><creatorcontrib>Ageishi, Masaki</creatorcontrib><creatorcontrib>Sato, Kaori</creatorcontrib><creatorcontrib>Tsuda, Kenji</creatorcontrib><creatorcontrib>Terauchi, Masami</creatorcontrib><collection>PubMed</collection><collection>CrossRef</collection><collection>MEDLINE - Academic</collection><jtitle>Microscopy</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Morikawa, Daisuke</au><au>Ageishi, Masaki</au><au>Sato, Kaori</au><au>Tsuda, Kenji</au><au>Terauchi, Masami</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Evaluation of TEM specimen quality prepared by focused ion beam using symmetry breaking index of convergent-beam electron diffraction</atitle><jtitle>Microscopy</jtitle><addtitle>Microscopy (Oxf)</addtitle><date>2021-08-09</date><risdate>2021</risdate><volume>70</volume><issue>4</issue><spage>394</spage><epage>397</epage><pages>394-397</pages><issn>2050-5698</issn><eissn>2050-5701</eissn><notes>ObjectType-Article-1</notes><notes>SourceType-Scholarly Journals-1</notes><notes>ObjectType-Feature-2</notes><notes>content type line 23</notes><abstract>Abstract
Degradation of the crystalline quality of transmission electron microscopy specimens in silicon prepared with different conditions has been examined using convergent-beam electron diffraction (CBED). The specimens are prepared using focused ion beam (FIB) with different accelerating voltages, Ar-ion milling and crushing method. Symmetry breaking of CBED patterns was quantitatively evaluated by symmetry breaking index S, which has been previously reported. The degradation and inhomogeneity of the FIB specimen were suppressed by decreasing the accelerating voltages of the FIB fabrication in the final process.</abstract><cop>UK</cop><pub>Oxford University Press</pub><pmid>33449081</pmid><doi>10.1093/jmicro/dfab002</doi><tpages>4</tpages><orcidid>https://orcid.org/0000-0001-9414-2891</orcidid><orcidid>https://orcid.org/0000-0001-8110-7499</orcidid></addata></record> |
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title | Evaluation of TEM specimen quality prepared by focused ion beam using symmetry breaking index of convergent-beam electron diffraction |
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