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Electron microscopy and ultraviolet photoemission spectroscopy studies of native oxides on GaN(0001)

We investigated native oxides on GaN(0001) using high-resolution scanning transmission electron microscopy (STEM) and ultraviolet photoemission spectroscopy (UPS). As a result, it was confirmed that the native oxides on both n-type and p-type GaN(0001) with a thickness of ∼1 nm were not amorphous bu...

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 2018-09, Vol.57 (9), p.98003
Main Authors: Irokawa, Yoshihiro, Mitsuishi, Kazutaka, Suzuki, Taku T., Yuge, Kazuya, Ohi, Akihiko, Nabatame, Toshihide, Ohnishi, Tsuyoshi, Kimoto, Koji, Koide, Yasuo
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Language:English
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Summary:We investigated native oxides on GaN(0001) using high-resolution scanning transmission electron microscopy (STEM) and ultraviolet photoemission spectroscopy (UPS). As a result, it was confirmed that the native oxides on both n-type and p-type GaN(0001) with a thickness of ∼1 nm were not amorphous but crystalline with lattice-matched structures to GaN, as we reported previously [Y. Irokawa et al., Jpn J. Appl. Phys. 56, 128004 (2017)]. Moreover, the UPS spectra of native oxides on n-type GaN(0001), which were similar to the reported clean GaN(0001) spectra, showed the existence of surface states at the valence band maximum (VBM), reflecting the defective quality of the native oxides.
ISSN:0021-4922
1347-4065
DOI:10.7567/JJAP.57.098003