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A SF6 RF plasma reactor for research on textile treatment

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Published in:Plasma sources science & technology 2001-02, Vol.10 (1), p.92-98
Main Authors: Riccardi, C, Barni, R, Fontanesi, M, Marcandalli, B, Massafra, M, Selli, E, Mazzone, G
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Language:English
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container_end_page 98
container_issue 1
container_start_page 92
container_title Plasma sources science & technology
container_volume 10
creator Riccardi, C
Barni, R
Fontanesi, M
Marcandalli, B
Massafra, M
Selli, E
Mazzone, G
description
doi_str_mv 10.1088/0963-0252/10/1/312
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source Institute of Physics:Jisc Collections:IOP Publishing Read and Publish 2024-2025 (Reading List)
subjects Electric and magnetic measurements
Electric discharges
Exact sciences and technology
Glow
corona
Physics
Physics of gases, plasmas and electric discharges
Physics of plasmas and electric discharges
Plasma applications
Plasma diagnostic techniques and instrumentation
Plasma heating (beam injection, radio-frequency and microwave, ohmic, icr, ecr and current drive heating)
Plasma production and heating
title A SF6 RF plasma reactor for research on textile treatment
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