TEM and SIMS Analysis of (100), (110), and (111) Single Crystal Niobium

Single crystal niobium specimens of (100), (110) and (111) crystal orientations have been analyzed using TEM and SIMS. The TEM specimens were prepared using Focused Ion Beam (FIB) and show niobium oxide thicknesses ranging from 4.9 to 8.3 nm for the three specimens after buffer chemical polishing. T...

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Bibliographic Details
Main Authors: Batchelor, A D, Leonard, D N, Russell, P E, Stevie, F A, Griffis, D P, Myneni, G R
Format: Conference Proceeding
Language:English
Subjects:
CARBON
CHEMICAL POLISHING
CRYSTAL STRUCTURE
HEAT TREATMENTS
HYDROGEN
ION BEAMS
LAYERS
MASS SPECTROSCOPY
MATERIALS SCIENCE
MONOCRYSTALS
NIOBIUM
NIOBIUM OXIDES
ORIENTATION
OXYGEN
SURFACES
TEMPERATURE DEPENDENCE
TRANSMISSION ELECTRON MICROSCOPY
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Summary:Single crystal niobium specimens of (100), (110) and (111) crystal orientations have been analyzed using TEM and SIMS. The TEM specimens were prepared using Focused Ion Beam (FIB) and show niobium oxide thicknesses ranging from 4.9 to 8.3 nm for the three specimens after buffer chemical polishing. The oxide layers appear uniform and no significant sub-oxide region was noted. SIMS analysis was made for all three orientations on hydrogen, carbon, and oxygen before and after heat treatments at 90, 600, and 1250 deg C. Hydrogen is at a high level between the oxide layer and niobium, but at a relatively low level in the oxide. No high oxygen concentration region was noted in the niobium below the oxide. C contamination on the surface is detected mainly at the surface. Analysis after heat treatments showed some decrease in hydrogen after the 600 deg C heat treatment, and significant oxidation of the niobium after the 1250 deg C heat treatment.
ISSN:0094-243X
1551-7616
DOI:10.1063/1.2770680