Wideband Air-Coupled CMUT Arrays for Acoustic Micro-Tapping

This paper presents a 32-element one-dimensional air-coupled capacitive micromachined ultrasonic transducer (CMUT) array designed to be part of a non-contact elastography system. To achieve the required bandwidth in air, staggered cell sizes are used. The completed devices showed a surface pressure...

Full description

Saved in:
Bibliographic Details
Main Authors: Coutant, Zachary A, Adelegan, Oluwafemi, Biliroglu, Ali Onder, Jeng, Geng-Shi, Pitre, John J., Kirby, Mitchell A., Pelivanov, Ivan, Yamaner, Feysel Yalcin, O'Donnell, Matthew, Oralkan, Omer
Format: Conference Proceeding
Language:English
Subjects:
Acoustic arrays
Acoustic Micro-Tapping
Acoustics
Air Coupled Transducers
CMUT
Resonant frequency
Ultrasonic transducer arrays
Ultrasonic transducers
Ultrasonic variables measurement
Wideband
Citations: Items that cite this one
Online Access:Request full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:This paper presents a 32-element one-dimensional air-coupled capacitive micromachined ultrasonic transducer (CMUT) array designed to be part of a non-contact elastography system. To achieve the required bandwidth in air, staggered cell sizes are used. The completed devices showed a surface pressure of 950 Pa at the center frequency of 1.45 MHz. The 3-dB, 6-dB, and 10-dB fractional bandwidths are 5%, 10%, and 12.8%.
ISSN:1948-5727
DOI:10.1109/IUS46767.2020.9251342