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Theory of high overtone bulk acoustic wave resonator as a gas sensor
A one-dimensional model analysis based on the high overtone bulk acoustic wave resonator (HEAR) spectroscopy theory is developed for the description of the operation of gas sensors. The sensor model consists of a thin film transducer with film electrodes located on the face surface of the low acoust...
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container_end_page | 472 vol.2 |
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creator | Mansfeld, G.D. |
description | A one-dimensional model analysis based on the high overtone bulk acoustic wave resonator (HEAR) spectroscopy theory is developed for the description of the operation of gas sensors. The sensor model consists of a thin film transducer with film electrodes located on the face surface of the low acoustic loss material plate with the other surface of the plate covered with a gas sensitive layer. The model implies the fact that the thickness of this layer increases due to gas absorption resulting in the frequency change of the resonator. It was found analytically that the sensor sensitivity increases a hundred times when the initial thickness of the layer is close to a quarter of the acoustic wavelength. |
doi_str_mv | 10.1109/MIKON.2000.913971 |
format | conference_proceeding |
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The sensor model consists of a thin film transducer with film electrodes located on the face surface of the low acoustic loss material plate with the other surface of the plate covered with a gas sensitive layer. The model implies the fact that the thickness of this layer increases due to gas absorption resulting in the frequency change of the resonator. It was found analytically that the sensor sensitivity increases a hundred times when the initial thickness of the layer is close to a quarter of the acoustic wavelength.</description><identifier>ISBN: 8390666235</identifier><identifier>ISBN: 9788390666235</identifier><identifier>DOI: 10.1109/MIKON.2000.913971</identifier><language>eng</language><publisher>IEEE</publisher><subject>Acoustic sensors ; Acoustic transducers ; Acoustic waves ; Electrodes ; Film bulk acoustic resonators ; Gas detectors ; Harmonic analysis ; Spectroscopy ; Surface acoustic waves ; Thin film sensors</subject><ispartof>13th International Conference on Microwaves, Radar and Wireless Communications. MIKON - 2000. Conference Proceedings (IEEE Cat. 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No.00EX428)</title><addtitle>MIKON</addtitle><description>A one-dimensional model analysis based on the high overtone bulk acoustic wave resonator (HEAR) spectroscopy theory is developed for the description of the operation of gas sensors. The sensor model consists of a thin film transducer with film electrodes located on the face surface of the low acoustic loss material plate with the other surface of the plate covered with a gas sensitive layer. The model implies the fact that the thickness of this layer increases due to gas absorption resulting in the frequency change of the resonator. It was found analytically that the sensor sensitivity increases a hundred times when the initial thickness of the layer is close to a quarter of the acoustic wavelength.</description><subject>Acoustic sensors</subject><subject>Acoustic transducers</subject><subject>Acoustic waves</subject><subject>Electrodes</subject><subject>Film bulk acoustic resonators</subject><subject>Gas detectors</subject><subject>Harmonic analysis</subject><subject>Spectroscopy</subject><subject>Surface acoustic waves</subject><subject>Thin film sensors</subject><isbn>8390666235</isbn><isbn>9788390666235</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2000</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><recordid>eNotj81OwzAQhC0hpELpA8DJL5CwztZOfETlpxWlveRerZNNEygxstOivj2RymVmpJFG3whxryBVCuzjx-p9u0kzAEitQpurK3FboAVjTIZ6ImYxfo4loNV6rm7Ec9myD2fpG9l2-1b6E4fB9yzd8fAlqfLHOHSV_KUTy8DR9zT4IClKkvtRI_fRhztx3dAh8uzfp6J8fSkXy2S9fVstntZJV9ghIWWQEUyR5WTHgFSbHJBJo2ucrm2tTJY5pRFGuGZemJEwd3mDVQGuqnEqHi6zHTPvfkL3TeG8u9zEP5S4SCI</recordid><startdate>2000</startdate><enddate>2000</enddate><creator>Mansfeld, G.D.</creator><general>IEEE</general><scope>6IE</scope><scope>6IL</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIL</scope></search><sort><creationdate>2000</creationdate><title>Theory of high overtone bulk acoustic wave resonator as a gas sensor</title><author>Mansfeld, G.D.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-i89t-a163e306827a9e303ad6703ea53bfb5d9d1622b1530955f4865417b7f3c80bcd3</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2000</creationdate><topic>Acoustic sensors</topic><topic>Acoustic transducers</topic><topic>Acoustic waves</topic><topic>Electrodes</topic><topic>Film bulk acoustic resonators</topic><topic>Gas detectors</topic><topic>Harmonic analysis</topic><topic>Spectroscopy</topic><topic>Surface acoustic waves</topic><topic>Thin film sensors</topic><toplevel>online_resources</toplevel><creatorcontrib>Mansfeld, G.D.</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan All Online (POP All Online) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE/IET Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP All) 1998-Present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Mansfeld, G.D.</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>Theory of high overtone bulk acoustic wave resonator as a gas sensor</atitle><btitle>13th International Conference on Microwaves, Radar and Wireless Communications. MIKON - 2000. Conference Proceedings (IEEE Cat. No.00EX428)</btitle><stitle>MIKON</stitle><date>2000</date><risdate>2000</risdate><volume>2</volume><spage>469</spage><epage>472 vol.2</epage><pages>469-472 vol.2</pages><isbn>8390666235</isbn><isbn>9788390666235</isbn><abstract>A one-dimensional model analysis based on the high overtone bulk acoustic wave resonator (HEAR) spectroscopy theory is developed for the description of the operation of gas sensors. The sensor model consists of a thin film transducer with film electrodes located on the face surface of the low acoustic loss material plate with the other surface of the plate covered with a gas sensitive layer. The model implies the fact that the thickness of this layer increases due to gas absorption resulting in the frequency change of the resonator. It was found analytically that the sensor sensitivity increases a hundred times when the initial thickness of the layer is close to a quarter of the acoustic wavelength.</abstract><pub>IEEE</pub><doi>10.1109/MIKON.2000.913971</doi></addata></record> |
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identifier | ISBN: 8390666235 |
ispartof | 13th International Conference on Microwaves, Radar and Wireless Communications. MIKON - 2000. Conference Proceedings (IEEE Cat. No.00EX428), 2000, Vol.2, p.469-472 vol.2 |
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language | eng |
recordid | cdi_ieee_primary_913971 |
source | IEEE Electronic Library (IEL) Conference Proceedings |
subjects | Acoustic sensors Acoustic transducers Acoustic waves Electrodes Film bulk acoustic resonators Gas detectors Harmonic analysis Spectroscopy Surface acoustic waves Thin film sensors |
title | Theory of high overtone bulk acoustic wave resonator as a gas sensor |
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