Control positioning of torsional electrostatic actuators by current driving

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Bibliographic Details
Main Authors: Guardia, R.N., Aigner, R., Nessler, W., Handtmann, M., Castaner, L.M.
Format: Conference Proceeding
Language:English
Subjects:
Capacitance measurement
CMOS technology
Control systems
Controllability
Electrodes
Electrostatic actuators
Equations
Microactuators
Parasitic capacitance
Voltage control
Online Access:Request full text
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DOI:10.1109/ASDAM.2000.889457