A Monolithically Integrated Pressure/Oxygen/Temperature Sensing SoC for Multimodality Intracranial Neuromonitoring

A fully integrated SoC for multimodality intracranial neuromonitoring is presented in this paper. Three sensors including a capacitive MEMS pressure sensor, an electrochemical oxygen sensor and a solid-state temperature sensor are integrated together in a single chip with their respective interface...

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Bibliographic Details
Published in:IEEE journal of solid-state circuits 2014-11, Vol.49 (11), p.2449-2461
Main Authors: Wai Pan Chan, Narducci, Margarita, Yuan Gao, Ming-Yuan Cheng, Jia Hao Cheong, George, Arup K., Daw Don Cheam, Siew Chong Leong, Damalerio, Maria Ramona B., Ruiqi Lim, Ming-Ling Tsai, Rahman, Abdur R. A., Mi Kyoung Park, Zhi Hui Kong, Prashanth, Rao Jai, Minkyu Je
Format: Article
Language:English
Subjects:
Capacitance
Capacitance to voltage converter (CVC)
capacitive pressure sensor
Capacitive sensors
electrochemical oxygen sensor
Electrodes
intracranial pressure (ICP)
Micromechanical devices
System-on-chip
temperature sensor
Temperature sensors
traumatic brain injury (TBI)
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Summary:A fully integrated SoC for multimodality intracranial neuromonitoring is presented in this paper. Three sensors including a capacitive MEMS pressure sensor, an electrochemical oxygen sensor and a solid-state temperature sensor are integrated together in a single chip with their respective interface circuits. Chopper stabilization and dynamic element matching techniques are applied in sensor interface circuits to reduce circuit noise and offset. On-chip calibration is implemented for each sensor to compensate process variations. Measured sensitivity of the pressure, oxygen, and temperature sensors are 18.6 aF/mmHg, 194 pA/mmHg, and 2 mV/°C, respectively. Implemented in 0.18 m CMOS, the SoC occupies an area of 1.4 mm × 4 mm and consumes 166 μW DC power. A prototype catheter for intracranial pressure (ICP) monitoring has been implemented and the performance has been verified with ex vivo experiment.
ISSN:0018-9200
1558-173X
DOI:10.1109/JSSC.2014.2345754