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Direct evaluation of threading dislocations in 4H-SiC through large-angle convergent beam electron diffraction
In this study, the structures of threading dislocations (TDs) in a 4H-SiC epilayer were directly characterised using large-angle convergent beam electron diffraction (LACBED) via transmission electron microscopy (TEM), by examining the splitting of reflections due to the presence of dislocation line...
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| Published in: | Philosophical magazine (Abingdon, England) England), 2020-01, Vol.100 (2), p.194-216 |
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| Main Authors: | , , , |
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| Language: | English |
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| cites | cdi_FETCH-LOGICAL-c376t-136570a5de48cc0d291ff08d4c5c7318eaf3493704478aab8e1d0271a03fe78f3 |
| container_end_page | 216 |
| container_issue | 2 |
| container_start_page | 194 |
| container_title | Philosophical magazine (Abingdon, England) |
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| creator | Hadorn, Jason Paul Tanuma, Ryohei Kamata, Isaho Tsuchida, Hidekazu |
| description | In this study, the structures of threading dislocations (TDs) in a 4H-SiC epilayer were directly characterised using large-angle convergent beam electron diffraction (LACBED) via transmission electron microscopy (TEM), by examining the splitting of reflections due to the presence of dislocation lines. Previously, X-ray topography (XRT) mapping in combination with ray-tracing simulations has been shown to be an efficient method for imaging and differentiating common TD types and variants in 4H-SiC. In this work, the validity of XRT-based results was verified by LACBED through direct evaluation and differentiation of the Burgers vectors and physical crystallographic features of all
threading edge,
threading screw, and
threading mixed dislocations variants. The LACBED results agreed with the XRT-based results with respect to TD type and variant. The screw-sense or half-plane orientation and Burgers vector determined from LACBED analysis for each TD were self-consistent. For the case of
-TEDs, atomic-resolution analysis of the core structure, through high-angle annular dark field scanning TEM, directly revealed two half-planes, each with a
Burgers vector component, and the sum of these components was confirmed to be
. Finally, an algorithm for efficient LACBED analysis of TDs in 4H-SiC was discussed. |
| doi_str_mv | 10.1080/14786435.2019.1673497 |
| format | article |
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threading edge,
threading screw, and
threading mixed dislocations variants. The LACBED results agreed with the XRT-based results with respect to TD type and variant. The screw-sense or half-plane orientation and Burgers vector determined from LACBED analysis for each TD were self-consistent. For the case of
-TEDs, atomic-resolution analysis of the core structure, through high-angle annular dark field scanning TEM, directly revealed two half-planes, each with a
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threading edge,
threading screw, and
threading mixed dislocations variants. The LACBED results agreed with the XRT-based results with respect to TD type and variant. The screw-sense or half-plane orientation and Burgers vector determined from LACBED analysis for each TD were self-consistent. For the case of
-TEDs, atomic-resolution analysis of the core structure, through high-angle annular dark field scanning TEM, directly revealed two half-planes, each with a
Burgers vector component, and the sum of these components was confirmed to be
. Finally, an algorithm for efficient LACBED analysis of TDs in 4H-SiC was discussed.</description><subject>4H-SiC</subject><subject>Burgers vector</subject><subject>dislocation</subject><subject>LACBED</subject><subject>TEM</subject><subject>topography</subject><issn>1478-6435</issn><issn>1478-6443</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2020</creationdate><recordtype>article</recordtype><recordid>eNp9kMtKAzEYhYMoWKuPIOQFZkwmmcl0p9RLhYILdR3-5jKNpIkk00rf3hlbXbr6r-eDcxC6pqSkpCU3lIu24awuK0JnJW0E4zNxgibjvmg4Z6d_PavP0UXOH4RUpCZ8gsK9S0b12OzAb6F3MeBocb9OBrQLHdYu-6h-Dhm7gPmieHXz8SFuuzX2kDpTQOi8wSqGnRnG0OOVgQ02fgCnAaidtQnUyLhEZxZ8NlfHOkXvjw9v80WxfHl6nt8tC8VE0xeUNbUgUGvDW6WIrmbUWtJqrmolGG0N2MEjE4QPtgBWraGaVIICYdaI1rIpqg9clWLOyVj5mdwG0l5SIsfQ5G9ocgxNHkMbdLcHnQs2pg18xeS17GHvYxo8BOWyZP8jvgGmRnVg</recordid><startdate>20200117</startdate><enddate>20200117</enddate><creator>Hadorn, Jason Paul</creator><creator>Tanuma, Ryohei</creator><creator>Kamata, Isaho</creator><creator>Tsuchida, Hidekazu</creator><general>Taylor & Francis</general><scope>AAYXX</scope><scope>CITATION</scope></search><sort><creationdate>20200117</creationdate><title>Direct evaluation of threading dislocations in 4H-SiC through large-angle convergent beam electron diffraction</title><author>Hadorn, Jason Paul ; Tanuma, Ryohei ; Kamata, Isaho ; Tsuchida, Hidekazu</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c376t-136570a5de48cc0d291ff08d4c5c7318eaf3493704478aab8e1d0271a03fe78f3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2020</creationdate><topic>4H-SiC</topic><topic>Burgers vector</topic><topic>dislocation</topic><topic>LACBED</topic><topic>TEM</topic><topic>topography</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Hadorn, Jason Paul</creatorcontrib><creatorcontrib>Tanuma, Ryohei</creatorcontrib><creatorcontrib>Kamata, Isaho</creatorcontrib><creatorcontrib>Tsuchida, Hidekazu</creatorcontrib><collection>CrossRef</collection><jtitle>Philosophical magazine (Abingdon, England)</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Hadorn, Jason Paul</au><au>Tanuma, Ryohei</au><au>Kamata, Isaho</au><au>Tsuchida, Hidekazu</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Direct evaluation of threading dislocations in 4H-SiC through large-angle convergent beam electron diffraction</atitle><jtitle>Philosophical magazine (Abingdon, England)</jtitle><date>2020-01-17</date><risdate>2020</risdate><volume>100</volume><issue>2</issue><spage>194</spage><epage>216</epage><pages>194-216</pages><issn>1478-6435</issn><eissn>1478-6443</eissn><abstract>In this study, the structures of threading dislocations (TDs) in a 4H-SiC epilayer were directly characterised using large-angle convergent beam electron diffraction (LACBED) via transmission electron microscopy (TEM), by examining the splitting of reflections due to the presence of dislocation lines. Previously, X-ray topography (XRT) mapping in combination with ray-tracing simulations has been shown to be an efficient method for imaging and differentiating common TD types and variants in 4H-SiC. In this work, the validity of XRT-based results was verified by LACBED through direct evaluation and differentiation of the Burgers vectors and physical crystallographic features of all
threading edge,
threading screw, and
threading mixed dislocations variants. The LACBED results agreed with the XRT-based results with respect to TD type and variant. The screw-sense or half-plane orientation and Burgers vector determined from LACBED analysis for each TD were self-consistent. For the case of
-TEDs, atomic-resolution analysis of the core structure, through high-angle annular dark field scanning TEM, directly revealed two half-planes, each with a
Burgers vector component, and the sum of these components was confirmed to be
. Finally, an algorithm for efficient LACBED analysis of TDs in 4H-SiC was discussed.</abstract><pub>Taylor & Francis</pub><doi>10.1080/14786435.2019.1673497</doi><tpages>23</tpages></addata></record> |
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| source | Taylor and Francis:Jisc Collections:Taylor and Francis Read and Publish Agreement 2024-2025:Science and Technology Collection (Reading list) |
| subjects | 4H-SiC Burgers vector dislocation LACBED TEM topography |
| title | Direct evaluation of threading dislocations in 4H-SiC through large-angle convergent beam electron diffraction |
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