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Control the Composition of Tantalum Oxynitride Films by Sputtering a Tantalum Target in Ar/O2/N2 Radiofrequency Magnetron Plasmas
by
Bousquet, Angélique
,
Zoubian, Fadi
,
Cellier, Joël
,
Sauvage, Thierry
,
Tomasella, Eric
Published in
Plasma processes and polymers
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Atmospheric Plasma-Enhanced Spatial Chemical Vapor Deposition of SiO2 Using Trivinylmethoxysilane and Oxygen Plasma
by
Nguyen, Viet Huong
,
Sekkat, Abderrahime
,
Masse de la Huerta, César Arturo
,
Zoubian, Fadi
,
Crivello, Chiara
,
Rubio-Zuazo, Juan
,
Jaffal, Moustapha
,
Bonvalot, Marceline
,
Vallée, Christophe
,
Aubry, Olivier
,
Rabat, Hervé
,
Hong, Dunpin
,
Muñoz-Rojas, David
Published in
Chemistry of materials
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Atmospheric Plasma-Enhanced Spatial Chemical Vapor Deposition of SiO 2 Using Trivinylmethoxysilane and Oxygen Plasma
by
Nguyen, Viet Huong
,
Sekkat, Abderrahime
,
Masse de la Huerta, César Arturo
,
Zoubian, Fadi
,
Crivello, Chiara
,
Rubio-Zuazo, Juan
,
Jaffal, Moustapha
,
Bonvalot, Marceline
,
Vallée, Christophe
,
Aubry, Olivier
,
Rabat, Hervé
,
Hong, Dunpin
,
Muñoz-Rojas, David
Published in
Chemistry of materials
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Study of the Synchronous Injection in a Controlled Pulsed Arc Plasma
by
Mavier, Fabrice
,
Zoubian, Fadi
,
Lemesre, Louise
,
Lejeune, Martine
,
Bienia, Marguerite
,
Rat, Vincent
Published in
Journal of thermal spray technology
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Development and characterization of an atmospheric pressure plasma reactor compatible with spatial ALD
by
Zoubian, F
,
Rabat, H
,
Aubry, O
,
Dumuis, N
,
Dozias, S
,
Muñozrojas, D
,
Hong, D
Published in
Journal of physics. Conference series
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Structural and ellipsometric study on tailored optical properties of tantalum oxynitride films deposited by reactive sputtering
by
Bousquet, Angélique
,
Zoubian, Fadi
,
Cellier, Joël
,
Taviot-Gueho, Christine
,
Sauvage, T
,
Tomasella, Eric
Published in
Journal of physics. D, Applied physics
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Control the Composition of Tantalum Oxynitride Films by Sputtering a Tantalum Target in Ar/ O 2 / N 2 Radiofrequency Magnetron Plasmas
by
Bousquet, Angélique
,
Zoubian, Fadi
,
Cellier, Joël
,
Sauvage, Thierry
,
Tomasella, Eric
Published in
Plasma processes and polymers
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Control the Composition of Tantalum Oxynitride Films by Sputtering a Tantalum Target in Ar/O sub(2)/N sub(2) Radiofrequency Magnetron Plasmas
by
Bousquet, Angelique
,
Zoubian, Fadi
,
Cellier, Joeel
,
Sauvage, Thierry
,
Tomasella, Eric
Published in
Plasma processes and polymers
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