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Investigating thin film stresses in stacked silicon dioxide/silicon nitride structures and quantifying their effects on frequency response
by
Zohni, Omar
,
Buckner, Gregory
,
Kim, Taeyun
,
Kingon, Angus
,
Maranchi, Jeff
,
Siergiej, Richard
Published in
Journal of micromechanics and microengineering
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Effects of adhesion layers on the ferroelectric properties of lead zirconium titanate thin films deposited on silicon nitride coated silicon substrates
by
Zohni, Omar
,
Buckner, Gregory
,
Kim, Taeyun
,
Kingon, Angus
,
Maranchi, Jeff
,
Siergiej, Richard
Published in
Thin solid films
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Journal Of Micromechanics And Microengineering
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Thin Solid Films
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Condensed Matter: Electronic Structure, Electrical, Magnetic, And Optical Properties
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Cross-Disciplinary Physics: Materials Science; Rheology
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Dielectric Thin Films
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Liquid Phase Epitaxy; Deposition From Liquid Phases
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Science Citation Index Expanded (Web Of Science)
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Institute Of Physics:jisc Collections:iop Publishing Journal Archive 1874-1998 (Access Period 2020 To 2024)
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Institute Of Physics:jisc Collections:iop Publishing Read And Publish 2024-2025 (Reading List)
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Sciencedirect Freedom Collection 2022-2024
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Institute Of Physics Iopscience Extra
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