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Search Results - Yelehanka, P
Search Results - Yelehanka, P
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Photoresist Trimming in Oxygen-Based High-Density Plasmas: Effect of HBr and Cl2 Addition to CF4/O2 Mixtures
by
Sin, Chian-Yuh
,
Chen, Bing-Hung
,
Loh, W. L
,
Yu, J
,
Yelehanka, P
,
See, A
,
Chan, L
Published in
Industrial & engineering chemistry research
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Effect of halogen in high-density oxygen plasmas on photoresist trimming
by
Sin, Chian-Yuh
,
Chen, Bing-Hung
,
Loh, W. L.
,
Yu, J.
,
Yelehanka, P.
,
See, A.
,
Chan, L.
Published in
AIChE journal
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Resist trimming technique in CF4/O2 high-density plasmas for sub-0.1 μm MOSFET fabrication using 248-nm lithography
by
SIN, Chian-Yuh
,
CHEN, Bing-Hung
,
LOH, W. L
,
YU, J
,
YELEHANKA, P
,
CHAN, L
Published in
Microelectronic engineering
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Photoresist Trimming in Oxygen-Based High-Density Plasmas: Effect of HBr and Cl 2 Addition to CF 4 /O 2 Mixtures
by
Sin, Chian-Yuh
,
Chen, Bing-Hung
,
Loh, W. L.
,
Yu, J.
,
Yelehanka, P.
,
See, A.
,
Chan, L.
Published in
Industrial & engineering chemistry research
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Pad etch optimization to minimize polymer
by
Bu, Xiaomei
,
Luo, Meng
,
Sin, ChianYuh
,
Zhang, Fan
,
Yelehanka, Pradeep
,
Jong Lee, Tae
,
Krishnamoorthy, Ahila
Published in
Microelectronic engineering
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Resist trimming technique in CF4/O2 high-density plasmas for sub-0.1 mm MOSFET fabrication using 248-nm lithography
by
Sin, C-Y
,
Chen, B-H
,
Loh, W L
,
Yu, J
,
Yelehanka, P
,
Chan, L
Published in
Microelectronic engineering
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Resist trimming technique in CF 4/O 2 high-density plasmas for sub-0.1 μm MOSFET fabrication using 248-nm lithography
by
Sin, Chian-Yuh
,
Chen, Bing-Hung
,
Loh, W.L
,
Yu, J
,
Yelehanka, P
,
Chan, L
Published in
Microelectronic engineering
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Critical dimension control optimization methodology on shallow trench isolation substrate for sub-0.25 μm technology gate patterning
by
Fan, M. H.
,
Gerung, H.
,
Yelehanka, P. R.
,
Cheng, A.
,
Zhou, M. S.
,
Chi, C.
,
Tan, C. H.
,
Xie, J.
Published in
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
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Resist trimming in high-density CF4/O2 plasmas for sub-0.1 μm device fabrication
by
Sin, Chian-Yuh
,
Chen, Bing-Hung
,
Loh, W. L.
,
Yu, J.
,
Yelehanka, P.
,
See, A.
,
Chan, L.
Published in
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena
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Resist trimming in high-density CF 4 / O 2 plasmas for sub-0.1 μm device fabrication
by
Sin, Chian-Yuh
,
Chen, Bing-Hung
,
Loh, W. L.
,
Yu, J.
,
Yelehanka, P.
,
See, A.
,
Chan, L.
Published in
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
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Wafer level microarcing model in 90 nm chemical-vapor deposition low- k via etch on 300 mm silicon-on-insulator substrate
by
Cong, Hai
,
Low, Chun Hui
,
Pradeep, Yelehanka Ramachandramurthy
,
Zhang, Xin
,
Chandima, Perera
,
Liu, Wu Ping
,
Tan, Juan Boon
,
Hsia, Liang Choo
Published in
Journal of vacuum science & technology. A, Vacuum, surfaces, and films
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Microelectronic Engineering
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Industrial & Engineering Chemistry Research
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