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Search Results - Van Ammel, Annemie
Search Results - Van Ammel, Annemie
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On the thermal stability of physically-vapor-deposited diffusion barriers in 3D Through-Silicon Vias during IC processing
by
Civale, Yann
,
Croes, Kristof
,
Miyamori, Yuichi
,
Velenis, Dimitrios
,
Redolfi, Augusto
,
Thangaraju, Sarasvathi
,
Ammel, Annemie Van
,
Cherman, Vladimir
,
Plas, Geert Van der
,
Cockburn, Andrew
,
Gravey, Virginie
,
Kumar, Nirajan
,
Cao, Zhitao
,
Travaly, Youssef
,
Tőkei, Zsolt
,
Beyne, Eric
,
Swinnen, Bart
Published in
Microelectronic engineering
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W versus Co--Al as Gate Fill-Metal for Aggressively Scaled Replacement High-$k$/Metal Gate Devices for (Sub-)22 nm Technology Nodes
by
Veloso, Anabela
,
Chew, Soon Aik
,
Schram, Tom
,
Dekkers, Harold
,
Ammel, Annemie Van
,
Witters, Thomas
,
Tielens, Hilde
,
Heylen, Nancy
,
Devriendt, Katia
,
Sebaai, Farid
,
Brus, Stephan
,
Ragnarsson, Lars-$Å$ke
,
Pantisano, Luigi
,
Eneman, Geert
,
Carbonell, Laure
,
Richard, Olivier
,
Favia, Paola
,
Geypen, Jef
,
Bender, Hugo
,
Higuchi, Yuichi
,
Phatak, Anup
,
Thean, Aaron
,
Horiguchi, Naoto
Published in
Japanese Journal of Applied Physics
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Effective Work Function Engineering for Aggressively Scaled Planar and Multi-Gate Fin Field-Effect Transistor-Based Devices with High-$k$ Last Replacement Metal Gate Technology
by
Veloso, Anabela
,
Chew, Soon Aik
,
Higuchi, Yuichi
,
Ragnarsson, Lars-$Å$ke
,
Simoen, Eddy
,
Schram, Tom
,
Witters, Thomas
,
Van Ammel, Annemie
,
Dekkers, Harold
,
Tielens, Hilde
,
Devriendt, Katia
,
Heylen, Nancy
,
Sebaai, Farid
,
Brus, Stephan
,
Favia, Paola
,
Geypen, Jef
,
Bender, Hugo
,
Phatak, Anup
,
Chen, Michael S
,
Lu, Xinliang
,
Ganguli, Seshadri
,
Lei, Yu
,
Tang, Wei
,
Fu, Xinyu
,
Gandikota, Srinivas
,
Noori, Atif
,
Brand, Adam
,
Yoshida, Naomi
,
Thean, Aaron
,
Horiguchi, Naoto
Published in
Japanese Journal of Applied Physics
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Thermal and plasma treatments for improved (sub-)1 nm equivalent oxide thickness planar and FinFET-based replacement metal gate high-k last devices and enabling a simplified scalab...
by
Veloso, Anabela
,
Boccardi, Guillaume
,
Ragnarsson, Lars-Åke
,
Higuchi, Yuichi
,
Arimura, Hiroaki
,
Lee, Jae Woo
,
Simoen, Eddy
,
Cho, Moon Ju
,
Roussel, Philippe J.
,
Paraschiv, Vasile
,
Shi, Xiaoping
,
Schram, Tom
,
Chew, Soon Aik
,
Brus, Stephan
,
Dangol, Anish
,
Vecchio, Emma
,
Sebaai, Farid
,
Kellens, Kristof
,
Heylen, Nancy
,
Devriendt, Katia
,
Dekkers, Harold
,
Van Ammel, Annemie
,
Witters, Thomas
,
Conard, Thierry
,
Vaesen, Inge
,
Richard, Olivier
,
Bender, Hugo
,
Athimulam, Raja
,
Chiarella, Thomas
,
Thean, Aaron
,
Horiguchi, Naoto
Published in
Japanese Journal of Applied Physics
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Growth evolution and characterization of ultra-thin CoGe2 films synthesized via a catalytic solid–vapour reaction technique
by
Peter, Antony Premkumar
,
Opsomer, Karl
,
Adelmann, Christoph
,
van Ammel, Annemie
,
Meersschaut, Johan
,
Moussa, Alain
,
Schaekers, Marc
,
Wen, Liang Gong
,
Zsolt, Tokei
,
Van Elshocht, Sven
Published in
Journal of materials chemistry. C, Materials for optical and electronic devices
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Thermal and plasma treatments for improved (sub-)1nm equivalent oxide thickness planar and FinFET-based replacement metal gate high-k last devices and enabling a simplified scalabl...
by
Veloso, Anabela
,
Boccardi, Guillaume
,
Ragnarsson, Lars-Ake
,
Higuchi, Yuichi
,
Arimura, Hiroaki
,
Lee, Jae Woo
,
Simoen, Eddy
,
Cho, Moon Ju
,
Roussel, Philippe J
,
Paraschiv, Vasile
Published in
Japanese Journal of Applied Physics
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Growth evolution and characterization of ultra-thin CoGe sub(2) films synthesized via a catalytic solid-vapour reaction technique
by
Peter, Antony Premkumar
,
Opsomer, Karl
,
Adelmann, Christoph
,
van Ammel, Annemie
,
Meersschaut, Johan
,
Moussa, Alain
,
Schaekers, Marc
,
Wen, Liang Gong
,
Zsolt, Tokei
,
Van Elshocht, Sven
Published in
Journal of materials chemistry. C, Materials for optical and electronic devices
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Seedless Copper Electrochemical Deposition on PVD Resistive Substrates as a Replacement/Enhancement for PVD Cu Seed Layers in HAR TSVs
by
Armini, Silvia
,
Wilson, Chris J.
,
Moussa, Alain
,
Franquet, Alexis
,
Vanstreels, Kris
,
Atanasova, Tanya
,
Radisic, Alex
,
Civale, Yann
,
Van Ammel, Annemie
,
El-Mekki, Zaid
,
Bryce, George
,
Ruythooren, Wouter
Published in
ECS transactions
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TSV Cu Plating and Implications for CMP
by
Radisic, Aleksandar
,
Philipsen, Harold
,
Honore, Mia
,
Wang, Yu-Shuen
,
Heylen, Nancy
,
El-Mekki, Zaid
,
Armini, Silvia
,
Vandersmissen, Kevin
,
Rodet, Simon
,
Van Ammel, Annemie
,
Bender, Hugo
,
Drijbooms, Christel
,
Vanstreels, Kris
,
Ruythooren, Wouter
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Implementation of Atomic Layer Deposition in Advanced Semiconductor Processes
by
Schaekers, Marc
,
Van Ammel, Annemie
,
Travaly, Youssef
,
Delabie, Annelies
,
Martin Hoyas, Ana
,
Zhao, Chao
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Conference Proceeding
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Thermal stability of copper Through-Silicon Via barriers during IC processing
by
Civale, Y.
,
Croes, K.
,
Miyamori, Y.
,
Thangaraju, S.
,
Redolfi, A.
,
Van Ammel, A.
,
Velenis, D.
,
Cherman, V.
,
Hendrickx, P.
,
Van der Plas, G.
,
Cockburn, A.
,
Gravey, V.
,
Kumar, N.
,
Zhitao Cao
,
Tezcan, D. S.
,
Soussan, P.
,
Travaly, Y.
,
Tokei, Z.
,
Beyne, E.
,
Swinnen, B.
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