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Search Results - Tuohiniemi, M.
Search Results - Tuohiniemi, M.
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Micro-electro-mechanical radio-frequency switch fixed electrode by wet etching of AlSi-based multilayer
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Tuohiniemi, M.
Published in
Thin solid films
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Surface-micromachined silicon air-gap Bragg reflector for thermal infrared
by
Tuohiniemi, M
,
Blomberg, M
Published in
Journal of micromechanics and microengineering
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Optical transmission performance of a surface-micromachined Fabry-Pérot interferometer for thermal infrared
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Tuohiniemi, M
,
Blomberg, M
,
Akujärvi, A
,
Antila, J
,
Saari, H
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Journal of micromechanics and microengineering
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Characterization of the tuning performance of a micro-machined Fabry-Pérot interferometer for thermal infrared
by
Tuohiniemi, M
,
Näsilä, A
,
Mäkynen, J
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Journal of micromechanics and microengineering
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Micro-machined Fabry-Pérot interferometer for thermal infrared
by
Tuohiniemi, M.
,
Nasila, A.
,
Antila, J.
,
Saari, H.
,
Blomberg, M.
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Conference Proceeding
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A laser-ablation system for deposition of high-temperature superconducting thin films for device applications
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Tuohiniemi, M.
,
Kajava, T.
,
Katila, T.
,
Salomaa, M.M.
,
Salomaa, R.
,
Supponen, E.
Published in
Applied physics. A, Materials science & processing
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