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Search Results - Speshilova, Anastasiya B.
Search Results - Speshilova, Anastasiya B.
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Development of controlled nanosphere lithography technology
by
Osipov, Artem A.
,
Gagaeva, Alina E.
,
Speshilova, Anastasiya B.
,
Endiiarova, Ekaterina V.
,
Bespalova, Polina G.
,
Osipov, Armenak A.
,
Belyanov, Ilya A.
,
Tyurikov, Kirill S.
,
Tyurikova, Irina A.
,
Alexandrov, Sergey E.
Published in
Scientific reports
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Fast and Controllable Synthesis of Core–Shell Fe3O4–C Nanoparticles by Aerosol CVD
by
Tyurikova, Irina A
,
Alexandrov, Sergey E
,
Tyurikov, Kirill S
,
Kirilenko, Demid A
,
Speshilova, Anastasiya B
,
Shakhmin, Alexander L
Published in
ACS omega
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Deep Etching of LiNbO3 Using Inductively Coupled Plasma in SF6-Based Gas Mixture
by
Osipov, Artem A.
,
Osipov, Armenak A.
,
Iankevich, Gleb A.
,
Speshilova, Anastasiya B.
,
Shakhmin, Alexander
,
Berezenko, Vladimir I.
,
Alexandrov, Sergey E.
Published in
Journal of microelectromechanical systems
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OES diagnostics of NF3/Xe plasma for deep structures in LiNbO3
by
Osipov, Artem A
,
Gagaeva, Alina E
,
Speshilova, Anastasiya B
,
Osipov, Armenak A
,
Alexandrov, Sergey E
Published in
Journal of physics. Conference series
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Fast and Controllable Synthesis of Core-Shell Fe 3 O 4 -C Nanoparticles by Aerosol CVD
by
Tyurikova, Irina A
,
Alexandrov, Sergey E
,
Tyurikov, Kirill S
,
Kirilenko, Demid A
,
Speshilova, Anastasiya B
,
Shakhmin, Alexander L
Published in
ACS omega
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OES diagnostics of NF 3 /Xe plasma for deep structures in LiNbO 3
by
Osipov, Artem A
,
Gagaeva, Alina E
,
Speshilova, Anastasiya B
,
Osipov, Armenak A
,
Alexandrov, Sergey E
Published in
Journal of physics. Conference series
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Deep Etching of LiNbO 3 Using Inductively Coupled Plasma in SF 6 -Based Gas Mixture
by
Osipov, Artem A.
,
Osipov, Armenak A.
,
Iankevich, Gleb A.
,
Speshilova, Anastasiya B.
,
Shakhmin, Alexander
,
Berezenko, Vladimir I.
,
Alexandrov, Sergey E.
Published in
Journal of microelectromechanical systems
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Silicon carbide dry etching technique for pressure sensors design
by
Osipov, Artem A.
,
Iankevich, Gleb A.
,
Osipov, Armenak A.
,
Speshilova, Anastasiya B.
,
Karakchieva, Anna A.
,
Endiiarova, Ekaterina V.
,
Levina, Svetlana N.
,
Karakchiev, Sergey V.
,
Alexandrov, Sergey E.
Published in
Journal of manufacturing processes
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ICP etching of SiC with low surface roughness
by
Osipov, Artem A.
,
Iankevich, Gleb A.
,
Berezenko, Vladimir I.
,
Speshilova, Anastasiya B.
,
Alexandrov, Sergey E.
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