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Abstracts of papers deposited at VINITI
by
Popov, L. E.
,
Sharkeev, Yu. P.
,
Koneva, N. A.
,
Esipenko, V. F.
,
Popov, V. L.
,
Brylikhanov, A. A.
,
Sergeev, V. L.
,
Timoshinin, V. S.
,
Lobikov, E. A.
,
Iremadze, S. G.
,
Kim, A. S.
,
Annenikov, Yu. M.
,
Balbakov, D.
,
Pichugin, V. F.
,
Memnonov, V. P.
,
Bagrov, V. G.
,
Bukhbinder, I. L.
,
Gitman, D. M.
,
Pavlov, P. M.
,
Tsaune, A. Ya
,
Golovchenko, E. I.
,
Botakin, A. A.
,
Salev, A. V.
,
Sharko, A. V.
,
Shukhovarov, V. F.
,
Seregin, G. V.
,
Denisov, D. A.
,
Knyazev, D. A.
,
Vafin, R. A.
,
Cheremisin, V. P.
,
Galishev, V. S.
,
Shapiro, M. M.
,
Volkov, L. A.
,
Demchenko, A. M.
,
Maronchuk, I. E.
,
Kuchumov, B. M.
,
Sal'man, E. G.
,
Vertoprakhov, V. N.
,
Grigor'ev, A. I.
,
Bakhyshov, A. E.
,
Akhmedov, A. M.
,
Rzaev, L. A.
,
Guseinov, G. D.
,
Gridchin, V. A.
,
Osintseva, L. A.
,
Kalinenko, D. I.
,
Sonchik, U. K.
,
Kovalevskaya, M. P.
,
Minchenko, L. S.
,
Kulikov, V. A.
,
Fatkullin, O. Kh
,
Popov, D. S.
,
Annenkov, Yu. M.
,
Korablev, G. A.
,
Mastov, Sh. R.
Published in
Soviet Physics Journal
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Mix-and-match EBP/optical lithography of 1 Mbit chips
by
Zapka, W.
,
Sonchik, S.
,
Behringer, U.
,
Haug, W.
,
Meissner, K.
,
Silverman, S.
,
Ziemlich, W.
,
Bohlen, H.
,
Smith, W.
Published in
Microelectronic engineering
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Microelectronic Engineering
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Microelectronic Engineering, Vol 13
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Soviet Physics Journal
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