Search Results - Robic, J.Y.

  • Showing 1 - 4 results of 4
Refine Results
  1. 1
    Rigorous electromagnetic simulation of EUV masks: influence of the absorber properties

    Rigorous electromagnetic simulation of EUV masks: influence of the absorber properties by Schiavone, Patrick, Granet, Gérard, Robic, J.Y.

    Get full text
    Items that this one cites
    Items that cite this one
    Article
    Save to List
    Saved in:
  2. 2
    Rigorous electromagnetic simulation of EUV masks: influence of the absorber properties

    Rigorous electromagnetic simulation of EUV masks: influence of the absorber properties by Schiavone, P., Granet, G., Robic, J.y

    Get full text
    Article
    Save to List
    Saved in:
  3. 3
    Residual stress in silicon dioxide thin films produced by ion-assisted deposition

    Residual stress in silicon dioxide thin films produced by ion-assisted deposition by Robic, J.Y., Leplan, H., Pauleau, Y., Rafin, B.

    Published in Thin solid films
    Get full text
    Items that this one cites
    Items that cite this one
    Article
    Save to List
    Saved in:
  4. 4
    On the nature of the disordered layer produced by ion implantation

    On the nature of the disordered layer produced by ion implantation by Zellama, K., Germain, P., Squelard, S., Bourgoin, J.C., Piaguet, J., Robic, J.Y.

    Get full text
    Items that this one cites
    Items that cite this one
    Article
    Save to List
    Saved in:

Search Tools: