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Cu-Doped TiNxOy Thin Film Resistors DC/RF Performance and Reliability
by
Shanidze, Lev V.
,
Tarasov, Anton S.
,
Rautskiy, Mikhail V.
,
Zelenov, Fyodor V.
,
Konovalov, Stepan O.
,
Nemtsev, Ivan V.
,
Voloshin, Alexander S.
,
Tarasov, Ivan A.
,
Baron, Filipp A.
,
Volkov, Nikita V.
Published in
Applied sciences
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Structural, Optical, and Electronic Properties of Cu-Doped TiN x O y Grown by Ammonothermal Atomic Layer Deposition
by
Baron, Filipp A
,
Mikhlin, Yurii L
,
Molokeev, Maxim S
,
Rautskiy, Mikhail V
,
Tarasov, Ivan A
,
Volochaev, Mikhail N
,
Shanidze, Lev V
,
Lukyanenko, Anna V
,
Smolyarova, Tatiana E
,
Konovalov, Stepan O
,
Zelenov, Fyodor V
,
Tarasov, Anton S
,
Volkov, Nikita V
Published in
ACS applied materials & interfaces
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Structural, Optical, and Electronic Properties of Cu-Doped TiNxOy Grown by Ammonothermal Atomic Layer Deposition
by
Baron, Filipp A
,
Mikhlin, Yurii L
,
Molokeev, Maxim S
,
Rautskiy, Mikhail V
,
Tarasov, Ivan A
,
Volochaev, Mikhail N
,
Shanidze, Lev V
,
Lukyanenko, Anna V
,
Smolyarova, Tatiana E
,
Konovalov, Stepan O
,
Zelenov, Fyodor V
,
Tarasov, Anton S
,
Volkov, Nikita V
Published in
ACS applied materials & interfaces
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Acs Applied Materials & Interfaces
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Applied Sciences
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Materials Science
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Materials Science, Multidisciplinary
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Science & Technology
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Technology
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Aging
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Atomic Layer Epitaxy
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Chemistry
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Chemistry, Multidisciplinary
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Circuit Reliability
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Circuits
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Copper Doped Titanium Oxynitride
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Design
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Electrical Resistivity
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Electron Beams
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