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2by Liehr, Maximilian, Hazra, Jubin, Beckmann, Karsten, Mukundan, Vineetha, Alexandrou, Ioannis, Yeow, Timothy, Race, Joseph, Tapily, Kandabara, Consiglio, Steven, Kurinec, Santosh K., Diebold, Alain C., Cady, NathanielGet full text
Published in Journal of vacuum science and technology. B, Nanotechnology & microelectronics
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