Search Results - Puźniak, Mirosław

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  1. 1
    Studies of Electrical Parameters and Thermal Stability of HiPIMS Hafnium Oxynitride (HfO x N y ) Thin Films

    Studies of Electrical Parameters and Thermal Stability of HiPIMS Hafnium Oxynitride (HfO x N y ) Thin Films by Puźniak, Mirosław, Gajewski, Wojciech, Seweryn, Aleksandra, Klepka, Marcin T, Witkowski, Bartłomiej S, Godlewski, Marek, Mroczyński, Robert

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    Technology and optimization of hafnium oxynitride (HfOxNy) thin-films formed by pulsed-DC reactive magnetron sputtering for MIS devices

    Technology and optimization of hafnium oxynitride (HfOxNy) thin-films formed by pulsed-DC reactive magnetron sputtering for MIS devices by Puźniak, Mirosław, Gajewski, Wojtek, Żelechowski, Marcin, Jamroz, Jan, Gertych, Arkadiusz, Zdrojek, Mariusz, Mroczyński, Robert

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