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Full-field EUV and immersion lithography integration in 0.186μm2 FinFET 6T-SRAM cell
by
Veloso, A.
,
Demuynck, S.
,
Ercken, M.
,
Goethals, A.M.
,
Demand, M.
,
de Marneffe, J.-F.
,
Altamirano, E.
,
De Keersgieter, A.
,
Delvaux, C.
,
De Backer, J.
,
Brus, S.
,
Hermans, J.
,
Baudemprez, B.
,
Van Roey, F.
,
Lorusso, G.F.
,
Baerts, C.
,
Goossens, D.
,
Vrancken, C.
,
Mertens, S.
,
Versluijs, J.J.
,
Truffert, V.
,
Huffman, C.
,
Laidler, D.
,
Heylen, N.
,
Ong, P.
,
Parvais, B.
,
Rakowski, M.
,
Verhaegen, S.
,
Hikavyy, A.
,
Meiling, H.
,
Hultermans, B.
,
Romijn, L.
,
Pigneret, C.
,
Lok, S.
,
Van Dijk, A.
,
Shah, K.
,
Noori, A.
,
Gelatos, J.
,
Arghavani, R.
,
Schreutelkamp, R.
,
Boelen, P.
,
Richard, O.
,
Bender, H.
,
Witters, L.
,
Collaert, N.
,
Rooyackers, R.
,
Absil, P.
,
Lauwers, A.
,
Jurczak, M.
,
Hoffmann, T.
,
Vanhaelemeersch, S.
,
Cartuyvels, R.
,
Ronse, K.
,
Biesemans, S.
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Demonstration of scaled 0.099µm2 FinFET 6T-SRAM cell using full-field EUV lithography for (Sub-)22nm node single-patterning technology
by
Veloso, A.
,
Demuynck, S.
,
Ercken, M.
,
Goethals, A.M.
,
Locorotondo, S.
,
Lazzarino, F.
,
Altamirano, E.
,
Huffman, C.
,
De Keersgieter, A.
,
Brus, S.
,
Demand, M.
,
Struyf, H.
,
De Backer, J.
,
Hermans, J.
,
Delvaux, C.
,
Baudemprez, B.
,
Vandeweyer, T.
,
Van Roey, F.
,
Baerts, C.
,
Goossens, D.
,
Dekkers, H.
,
Ong, P.
,
Heylen, N.
,
Kellens, K.
,
Volders, H.
,
Hikavyy, A.
,
Vrancken, C.
,
Rakowski, M.
,
Verhaegen, S.
,
Dusa, M.
,
Romijn, L.
,
Pigneret, C.
,
Van Dijk, A.
,
Schreutelkamp, R.
,
Cockburn, A.
,
Gravey, V.
,
Meiling, H.
,
Hultermans, B.
,
Lok, S.
,
Shah, K.
,
Rajagopalan, R.
,
Gelatos, J.
,
Richard, O.
,
Bender, H.
,
Vandenberghe, G.
,
Beyer, G.P.
,
Absil, P.
,
Hoffmann, T.
,
Ronse, K.
,
Biesemans, S.
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Urban pollution of sediments: Impact on the physiology and burrowing activity of tubificid worms and consequences on biogeochemical processes
by
Pigneret, M.
,
Mermillod-Blondin, F.
,
Volatier, L.
,
Romestaing, C.
,
Maire, E.
,
Adrien, J.
,
Guillard, L.
,
Roussel, D.
,
Hervant, F.
Published in
The Science of the total environment
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Aux électeurs des campagnes / signé E. Maury, J. Pigneret
by
Maury, E.. Auteur du texte
,
Pigneret, J. (18..-18..?
,
imprimeur à Macon). Auteur du texte
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Time resolution of planar GeLli) detectors in γ -γ coincidence experiments
by
Balland, J. C.
,
Pigneret, J.
,
Samueli, J. J.
,
Sarazin, A.
Published in
IEEE transactions on nuclear science
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