Search Results - Pickert, Larry

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    Micro Four-Point Probe with High Spatial Resolution for Ion Implantation and Ultra-Shallow Junction Characterization

    Micro Four-Point Probe with High Spatial Resolution for Ion Implantation and Ultra-Shallow Junction Characterization by Kjaer, Daniel, Lin, Rong, Petersen, Dirch Hjorth, Kopalidis, Petros M, Eddy, Ronald, Walker, David A, Egelhoff, William F, Pickert, Larry

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