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Optical characterization of HfO2 thin films grown by atomic layer deposition
by
AARIK, Jaan
,
MÄNDAR, Hugo
,
KIRM, Marco
,
PUNG, Lembit
Published in
Thin solid films
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Effect of selected atomic layer deposition parameters on the structure and dielectric properties of hafnium oxide films
by
Kukli, Kaupo
,
Aarik, Jaan
,
Ritala, Mikko
,
Uustare, Teet
,
Sajavaara, Timo
,
Lu, Jun
,
Sundqvist, Jonas
,
Aidla, Aleks
,
Pung, Lembit
,
Hårsta, Anders
,
Leskelä, Markku
Published in
Journal of applied physics
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Mechanisms of suboxide growth and etching in atomic layer deposition of tantalum oxide from TaCl5 and H2O
by
AARIK, J
,
KUKLI, K
,
AIDLA, A
,
PUNG, L
Published in
Applied surface science
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Hole traps and thermoluminescence in Li2B4O7:Be
by
Kerikmäe, Mihkel
,
Danilkin, Mikhail
,
Lust, Aime
,
Nagirnyi, Vitali
,
Pung, Lembit
,
Ratas, Arno
,
Romet, Ivo
,
Seeman, Viktor
Published in
Radiation measurements
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Engineering structure and properties of hafnium oxide films by atomic layer deposition temperature
by
Kukli, Kaupo
,
Aarik, Jaan
,
Uustare, Teet
,
Lu, Jun
,
Ritala, Mikko
,
Aidla, Aleks
,
Pung, Lembit
,
Hårsta, Anders
,
Leskelä, Markku
,
Kikas, Arvo
,
Sammelselg, Väino
Published in
Thin solid films
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Optical characterization of HfO 2 thin films grown by atomic layer deposition
by
Aarik, Jaan
,
Mändar, Hugo
,
Kirm, Marco
,
Pung, Lembit
Published in
Thin solid films
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Erratum: Effect of selected atomic layer deposition parameters on the structure and dielectric properties of hafnium oxide films [J. Appl. Phys. 96, 5298 (2004)]
by
Kukli, Kaupo
,
Aarik, Jaan
,
Ritala, Mikko
,
Uustare, Teet
,
Sajavaara, Timo
,
Lu, Jun
,
Sundqvist, Jonas
,
Aidla, Aleks
,
Pung, Lembit
,
Hårsta, Anders
,
Leskelä, Markku
Published in
Journal of applied physics
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Erratum: Effect of selected atomic layer deposition parameterson the structure and dielectric properties of hafnium oxide films[ J. Appl. Phys. 96 , 5298 ( 2004 ) ]
by
Kukli, Kaupo
,
Aarik, Jaan
,
Ritala, Mikko
,
Uustare, Teet
,
Sajavaara, Timo
,
Lu, Jun
,
Sundqvist, Jonas
,
Aidla, Aleks
,
Pung, Lembit
,
Hårsta, Anders
,
Leskelä, Markku
Published in
Journal of applied physics
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Mechanisms of suboxide growth and etching in atomic layer deposition of tantalum oxide from TaCl 5 and H 2O
by
Aarik, Jaan
,
Kukli, Kaupo
,
Aidla, Aleks
,
Pung, Lembit
Published in
Applied surface science
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Journal Of Applied Physics
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Thin Solid Films
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