A new method for hermeticity measurements using porous ultra low k dielectrics for sub-ppm moisture detection by Grange, H., Danel, J.S., Feldis, H., Desloges, B., Jousseaume, V., Licitra, C., Manquat, P.B., Grosgeorges, P., Fassi, B., Sbiaa, Z., Robert, P.

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