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1by Chapman, H. N., Ray-Chaudhuri, A. K., Tichenor, D. A., Replogle, W. C., Stulen, R. H., Kubiak, G. D., Rockett, P. D., Klebanoff, L. E., O’Connell, D., Leung, A. H., Jefferson, K. L., Wronosky, J. B., Taylor, J. S., Hale, L. C., Blaedel, K., Spiller, E. A., Sommargren, G. E., Folta, J. A., Sweeney, D. W., Gullikson, E. M., Naulleau, P., Goldberg, K. A., Bokor, J., Attwood, D. T., Mickan, U., Hanzen, R., Panning, E., Yan, P.-Y., Gwyn, C. W., Lee, S. H.Get full text
Published in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
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