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Search Results - Kembo, Yukio
Search Results - Kembo, Yukio
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New AFM imaging for observing a high aspect structure
by
Hosaka, Sumio
,
Morimoto, Takafumi
,
Kuroda, Hiroshi
,
Minomoto, Yasushi
,
Kembo, Yukio
,
Koyabu, Hirokazu
Published in
Applied surface science
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Atomic Force Microscopy for High Aspect Ratio Structure Metrology
by
Morimoto, Takafumi
,
Kuroda, Hiroshi
,
Minomoto, Yasushi
,
Nagano, Yoshiyuki
,
Kembo, Yukio
,
Hosaka, Sumio
Published in
Japanese Journal of Applied Physics
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Highly Precise Atomic Force Microscope Measurement of High-Aspect Nanostructure Free of Probe Bending Error
by
Hosaka, Sumio
,
Terauchi, Daisuke
,
Sone, Hayato
,
Morimoto, Takafumi
,
Kembo, Yukio
,
Koyanagi, Hajime
Published in
Japanese Journal of Applied Physics
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Fine particle inspection down to 38 nm on bare wafer with micro roughness by side-scattering light detection
by
NOGUCHI, M
,
KEMBO, Y
Published in
Japanese Journal of Applied Physics
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DETECTION AND IMAGING OF SUBSURFACE MICROCRACKS IN SILICON-WAFERS USING PHOTOACOUSTIC MICROSCOPE
by
NAKATA, T
,
KEMBO, Y
,
KITAMORI, T
,
SAWADA, T
Published in
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS
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